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An Intelligent Monitoring System of Semiconductor Processing Equipment using Multiple Time-Series Pattern Recognition
Joong Jae Lee , O Bum Kwon , Gye Young Kim KIPS Transactions on Software and Data Engineering,
Vol. 11, No. 3, pp. 709-716,
Mar.
2004
10.3745/KIPSTD.2004.11.3.709
10.3745/KIPSTD.2004.11.3.709
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Vol. 9, 2020
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Vol. 1, 2012
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